Process Monitoring Systems from Entegris

Description

Advanced systems for automated online particle size and/or counts analysis of suspensions

Features:
  • Unique single particle optical sizing (SPOS) technology, allows users to individually size and count particles over a wide range with unprecedented accuracy
  • AccuSizer® SPOS systems available in LE, FX, and FX-Nano configurations to meet the unique needs of your CMP slurry characteristics
  • Nicomp® N3000 online system can be integrated into many nanoparticle processes, providing real-time particle size distributions