AccuSizer® SPOS Systems from Entegris


A comprehensive portfolio of high accuracy and resolution liquid particle counters that determine particle size and concentration of your suspensions.

  • Uses single particle optical sizing (SPOS) technology to provide extended dynamic size and concentration ranges
  • Can be used as a liquid particle counter for contamination applications or as sophisticated particle size analyzer
  • Highest sensitivity technology available to determine tails of distribution such as large particle counts (LPC) in CMP slurries, protein aggregates, or tails of emulsions (PFAT5)
  • Fast, multi-channel pulse height analyzers that can report results in up to 1024 size bins
  • Several fluidics configurations are available to deliver the sample to the sensor directly or with auto dilution to avoid coincidence errors

  • Product Specs
  • ItemAccuSizer® SPOS Systems
  • CompanyEntegris
  • PriceGet quote
  • Catalog NumberAccuSizer
  • TypeLiquid particle counters
  • Pharmaceutical ApplicationPharmaceutical injectables, Chemical Mechanical Planarization (CMP) slurries, Filter testing, Contamination, Emulsions, Microbubbles, Inks and paints