Process Monitoring Systems from Entegris


Advanced systems for automated online particle size and/or counts analysis of suspensions

  • Unique single particle optical sizing (SPOS) technology, allows users to individually size and count particles over a wide range with unprecedented accuracy
  • AccuSizer® SPOS systems available in LE, FX, and FX-Nano configurations to meet the unique needs of your CMP slurry characteristics
  • Nicomp® N3000 online system can be integrated into many nanoparticle processes, providing real-time particle size distributions

  • Product Specs
  • ItemProcess Monitoring Systems
  • CompanyEntegris
  • PriceGet quote
  • Catalog NumberProcess Monitoring
  • TypeAutomated particle size counter
  • Pharmaceutical ApplicationDetecting oversized particles in chemical mechanical planarization (CMP) slurries, Nanoparticle online analysis